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回转构件平衡计算分析

Balance calculation and analysis of rotating members

Advance in Modern Physics / 2019,1(2): 33-38 / 2019-12-26 939 890

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• Authors: 白超     
• Information:

  青海师范大学，西宁

• Keywords: 半导体；设备；回转构件；平衡
• Semiconductor; Equipment; Rotary member; Balance
• Abstract: 随着国内半导体设备行业技术的迅速发展，对回转构件的平衡精度要 求越来越高，尤其在硅加工行业中表现尤为突出，针对半导体设备的平衡精度 要求，系统阐述了机械平衡的重要性，工程设计中平衡精度选择方式，刚性回 转构件的平衡计算以及在实践中对一般、特殊转子的动静平衡方法。
• With the rapid development of the domestic semiconductor equipment industry technology, the balance of rotary components precision demand is higher and higher, especially in silicon processing industry performance, especially for the balance of the semiconductor equipment precision requirements, the system elaborated the importance of mechanical balance, balance precision in engineering design to choose way, rigid balance calculation of rotary components as well as in practice of dynamic and static balance method of general and special rotor.
• DOI: https://doi.org/10.35534/amp.0102006c
• Cite: 白超．回转构件平衡计算分析［J］．现代物理进展，2019，1（2）：33-38．