回转构件平衡计算分析_现代物理进展_世刊出版平台_开源期刊_期刊发表_快速发表_发表论文

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回转构件平衡计算分析

现代物理进展 / 2019,1(2)：33-38 / 2019-12-26 look

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作者：白超
单位：
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青海师范大学，西宁
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关键词：半导体；设备；回转构件；平衡
Semiconductor; Equipment; Rotary member; Balance
摘要：随着国内半导体设备行业技术的迅速发展，对回转构件的平衡精度要求越来越高，尤其在硅加工行业中表现尤为突出，针对半导体设备的平衡精度要求，系统阐述了机械平衡的重要性，工程设计中平衡精度选择方式，刚性回转构件的平衡计算以及在实践中对一般、特殊转子的动静平衡方法。
With the rapid development of the domestic semiconductor equipment industry technology, the balance of rotary components precision demand is higher and higher, especially in silicon processing industry performance, especially for the balance of the semiconductor equipment precision requirements, the system elaborated the importance of mechanical balance, balance precision in engineering design to choose way, rigid balance calculation of rotary components as well as in practice of dynamic and static balance method of general and special rotor.
DOI： https://doi.org/10.35534/amp.0102006c
引用：白超．回转构件平衡计算分析［J］．现代物理进展，2019，1（2）：33-38．